JPS5231981Y2 - - Google Patents

Info

Publication number
JPS5231981Y2
JPS5231981Y2 JP12932274U JP12932274U JPS5231981Y2 JP S5231981 Y2 JPS5231981 Y2 JP S5231981Y2 JP 12932274 U JP12932274 U JP 12932274U JP 12932274 U JP12932274 U JP 12932274U JP S5231981 Y2 JPS5231981 Y2 JP S5231981Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12932274U
Other languages
Japanese (ja)
Other versions
JPS5154391U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12932274U priority Critical patent/JPS5231981Y2/ja
Priority to GB4345975A priority patent/GB1483966A/en
Priority to DE2547552A priority patent/DE2547552B2/de
Priority to US05/625,041 priority patent/US4152478A/en
Publication of JPS5154391U publication Critical patent/JPS5154391U/ja
Application granted granted Critical
Publication of JPS5231981Y2 publication Critical patent/JPS5231981Y2/ja
Priority to US06/011,917 priority patent/US4217855A/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP12932274U 1974-10-23 1974-10-23 Expired JPS5231981Y2 (en])

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP12932274U JPS5231981Y2 (en]) 1974-10-23 1974-10-23
GB4345975A GB1483966A (en) 1974-10-23 1975-10-22 Vapourized-metal cluster ion source and ionized-cluster beam deposition
DE2547552A DE2547552B2 (de) 1974-10-23 1975-10-23 Schichtaufdampfverfahren und -einrichtung
US05/625,041 US4152478A (en) 1974-10-23 1975-10-23 Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate
US06/011,917 US4217855A (en) 1974-10-23 1979-02-13 Vaporized-metal cluster ion source and ionized-cluster beam deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12932274U JPS5231981Y2 (en]) 1974-10-23 1974-10-23

Publications (2)

Publication Number Publication Date
JPS5154391U JPS5154391U (en]) 1976-04-26
JPS5231981Y2 true JPS5231981Y2 (en]) 1977-07-21

Family

ID=28386811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12932274U Expired JPS5231981Y2 (en]) 1974-10-23 1974-10-23

Country Status (1)

Country Link
JP (1) JPS5231981Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6093505U (ja) * 1983-12-02 1985-06-26 東海キヤスター株式会社 キャスタ

Also Published As

Publication number Publication date
JPS5154391U (en]) 1976-04-26

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